40, 1, Novatorov st., Moscow, 119421, Russia
Phone: +7 (495) 935-97-77
Fax: +7 (495) 935-59-11
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Internet: www.nicpv.ru

Activity branch/products

Metrology and Nanodiagnostics; State scientific metrological center; State center for testing of measuring instruments; member of the International Association SEMI (Semiconductor Equipment and Materials International); Head of the Russian Technical Committee on Standardization ТС 441 “Nanotechnologies and Nanomaterials”; Metrology for high technologies: nanotechnologies, micro- and nanoelectronics, MEMS and MOEMS technologies, biotechnologies. Research and development of physical principles, methods, and tools for metrology, including nanometrology; Characterization, verification, calibration of measuring devices and quality control of technological processes in micro- and nanotechnologies; Testing and quality control of products of high technologies and industry.

Dedelopments

• Reference standard MShPS-2.0K for calibration of scanning electron (SEM) and atomic force (AFM) microscopes